Process engineering analysis in semiconductor device fabrication (Record no. 28711)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00378nam a2200121Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 240125s9999||||xx |||||||||||||| ||und|| |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | N93 MID.H |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Middleman, Stanlay & hochberg, authork. |
| 245 #0 - TITLE STATEMENT | |
| Title | Process engineering analysis in semiconductor device fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher | Mc Graw Hil, Inc. |
| Place of publication | New York |
| Year of publication | 1993 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Lost status | Damaged status | Permanent Location | Current Location | Shelving location | Date acquired | Cost, normal purchase price | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| Nalanda Library | Nalanda Library | Circulation Books | 2705.00 | 621.38152 N93 MID.H | G2132 | Books |