Microlithography fundamentals in semiconductor devices and fabrication technology (Record no. 456)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00357nam a2200109Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230620s9999||||xx |||||||||||||| ||und|| |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | N98 NON.T |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Nonogaki, Saburo |
| 245 #0 - TITLE STATEMENT | |
| Title | Microlithography fundamentals in semiconductor devices and fabrication technology |
| Statement of responsibility, etc | Nonogaki, Saburo |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher | Marcel Dekker |
| Year of publication | 1998 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Lost status | Damaged status | Permanent Location | Current Location | Shelving location | Date acquired | Cost, normal purchase price | Full call number | Accession Number | Koha item type |
|---|---|---|---|---|---|---|---|---|---|
| Nalanda Library | Nalanda Library | Circulation Books | 20/06/2023 | 10152.00 | 621.38152 N98 NON.T | 714 | Books |