Madou, Marc J.  <br/><br/>
Fundamentals of microfabrication and nanotechology  : manufacturing techniques for microfabrication and nanotechnology 
Madou, Marc J.  
 - 3rd ed.  
 -   CRC Press  2012 
<br/><br/><label>Dewey Class. No.: </label>620.5  / T12 MAD