Micro electro mechanical systems (MEMS) 

 - 2nd ed. 
 - New York  3G E-learning  2018 
 - 331p. 
<br/><br/><label>ISBN: </label>9781680948455 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.381  / T18 ELE