Jaeger, Richard C <br/><br/>
Introduction to microelectronic fabrication  

 - 2nd ed. 
 - U.S.A  Pearson  2002 
 - 316p. 
 - Modular series on solid state devices   5 .
<br/><br/><label>ISBN: </label>9780201444940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics 
<br/><br/><label>Dewey Class. No.: </label>621.395  / T02 JAE