| 000 | 00327nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230715s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a620.11228 _bT16 YAM |
||
| 100 |
_a Yamada, Isao _94750 |
||
| 245 | 0 |
_a Materials processing by cluster ion beams _c Yamada, Isao |
|
| 260 |
_bCRC Press _c2016 |
||
| 942 | _cBK | ||
| 999 |
_c10459 _d10459 |
||