| 000 | 00364nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 230718s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_bT18 SES.S _a621.38152 |
||
| 100 |
_a Seshan, Krishna (Ed.) _92576 |
||
| 245 | 0 |
_a Handbook of thin film deposition _c Seshan, Krishna (Ed.) |
|
| 250 | _a 4th ed. | ||
| 260 |
_b Elsevier _c2018 |
||
| 942 | _cBK | ||
| 999 |
_c11144 _d11144 |
||