000 00279nam a2200109Ia 4500
008 230718s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _bT15 DUN
_a660.6
245 0 _a Micromachining techniques and applications
260 _b NY Research Press
_c2015
942 _cBK
999 _c11380
_d11380