000 | 00369nam a2200133Ia 4500 | ||
---|---|---|---|
008 | 230720s9999||||xx |||||||||||||| ||und|| | ||
041 | _aeng | ||
082 |
_aBK _bT02 OHR |
||
100 |
_a Ohring, Milton _92665 |
||
245 | 0 |
_a Materials science of thin films _b: deposition and structure _c Ohring, Milton |
|
250 | _a 2nd ed. | ||
260 |
_b Academic _c2002 |
||
942 | _cBK | ||
999 |
_c13253 _d13253 |