000 00369nam a2200133Ia 4500
008 230720s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _aBK
_bT02 OHR
100 _a Ohring, Milton
_92665
245 0 _a Materials science of thin films
_b: deposition and structure
_c Ohring, Milton
250 _a 2nd ed.
260 _b Academic
_c2002
942 _cBK
999 _c13253
_d13253