000 00326nam a2200121Ia 4500
008 230720s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _aBK
_bT07 ALF.F
100 _a Alford, Terry L.
_97145
245 0 _a Fundamentals of nanoscale film analysis
_c Alford, Terry L.
260 _b Springer
_c2007
942 _cBK
999 _c13369
_d13369