| 000 | 00349nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230721s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a620.5 _bT10 GAO |
||
| 100 |
_a Gao, Wei _98759 |
||
| 245 | 0 |
_a Precision nanometrology _b: senso and measuring systems for nanomanufacturing _c Gao, Wei |
|
| 260 |
_b Springer _c2010 |
||
| 942 | _cBK | ||
| 999 |
_c15437 _d15437 |
||