| 000 | 00430nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 230721s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a620.5 _bT12 MAD |
||
| 100 |
_a Madou, Marc J. _98893 |
||
| 245 | 0 |
_a Fundamentals of microfabrication and nanotechology _b: manufacturing techniques for microfabrication and nanotechnology _c Madou, Marc J. |
|
| 250 | _a 3rd ed. | ||
| 260 |
_b CRC Press _c2012 |
||
| 942 | _cBK | ||
| 999 |
_c15602 _d15602 |
||