000 00374nam a2200133Ia 4500
008 230721s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _a621.395
_bN94 GHA
100 _a Ghandhi, Sorab, K.
245 0 _a VLSI fabrication principles
_b: silicon and gallium aenide
_c Ghandhi, Sorab, K.
250 _a 2nd ed.
260 _b John Wiley
_c1994
942 _cBK
999 _c16172
_d16172