000 | 00374nam a2200133Ia 4500 | ||
---|---|---|---|
008 | 230721s9999||||xx |||||||||||||| ||und|| | ||
041 | _aeng | ||
082 |
_a621.395 _bN94 GHA |
||
100 | _a Ghandhi, Sorab, K. | ||
245 | 0 |
_a VLSI fabrication principles _b: silicon and gallium aenide _c Ghandhi, Sorab, K. |
|
250 | _a 2nd ed. | ||
260 |
_b John Wiley _c1994 |
||
942 | _cBK | ||
999 |
_c16172 _d16172 |