000 00327nam a2200121Ia 4500
008 230721s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _a670
_bT10 QIN
100 _a Qin, Yi [ed.]
_94558
245 0 _a Micromanufacturing engineering and technology
_c Qin, Yi [ed.]
260 _b Elsevier
_c2010
942 _cBK
999 _c16236
_d16236