| 000 | 00333nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230721s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a620.5 _bT06 MAH |
||
| 100 |
_a Mahalik, N.P. [ed.] _99386 |
||
| 245 | 0 |
_a Micromanufacturing and nanotechnology _c Mahalik, N.P. [ed.] |
|
| 260 |
_b Springer _c2006 |
||
| 942 | _cBK | ||
| 999 |
_c16237 _d16237 |
||