000 00317nam a2200121Ia 4500
008 230721s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _a620.5
_bT07 JAC
100 _a Jackson, Mark J.
_99387
245 0 _a Micro and nanomanufacturing
_c Jackson, Mark J.
260 _b Springer
_c2007
942 _cBK
999 _c16238
_d16238