| 000 | 00378nam a2200121Ia 4500 | ||
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| 008 | 230721s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bT09 BAK.M |
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| 100 |
_a Bakir, Muhannad S. [ed.] _99541 |
||
| 245 | 0 |
_a Integrated interconnect technologies for 3D nanoelectronic systems _c Bakir, Muhannad S. [ed.] |
|
| 260 |
_b Artech House _c2009 |
||
| 942 | _cBK | ||
| 999 |
_c16439 _d16439 |
||