| 000 | 00334nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230727s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 | _bT14 SAR | ||
| 100 |
_a Sarkar, Jaydeep _911240 |
||
| 245 | 0 |
_a Sputtering materials for VLSI and thin film devices _c Sarkar, Jaydeep |
|
| 260 |
_b Elsevier _c2014 |
||
| 942 | _cBK | ||
| 999 |
_c18748 _d18748 |
||