| 000 | 00347nam a22001337a 4500 | ||
|---|---|---|---|
| 005 | 20230906092220.0 | ||
| 008 | 230906b |||||||| |||| 00| 0 eng d | ||
| 041 | _aeng | ||
| 100 |
_aHoffman, Dorothy M _912418 |
||
| 245 | _aHandbook of Vacuum science and technology | ||
| 260 |
_aUSA _bElsevier Academic Press _c2005 |
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| 300 | _a835 | ||
| 942 | _cBK | ||
| 999 |
_c20222 _d20222 |
||