000 00474nam a22001817a 4500
005 20250529141326.0
008 230906b |||||||| |||| 00| 0 eng d
020 _a9780387462813
041 _aeng
082 _a620.5
_bT08 HES
245 _aBioNanoFluidic MEMS
260 _aUSA
_bSpringer
_c2008
300 _a295p.
440 _aMEMS Reference Shelf
_921837
650 _aEngineering and allied operations
_919615
700 _aHesketh, Peter J.
_921838
942 _cBK
999 _c20247
_d20247