000 00466nam a2200181Ia 4500
005 20250504190037.0
008 230918s9999||||xx |||||||||||||| ||und||
020 _a9780471270522
041 _aeng
082 _a621.55
_bT03 OHA
100 _aO'Hanlon, John F.
_912697
245 2 _aUser's guide to vacuum technology
250 _a3rd ed.
260 _aNew Jersey
_bJohn Wiley & Sons
_c2003
300 _a516p.
650 _aApplied physics
_918067
942 _cBK
999 _c20891
_d20891