| 000 | 00368nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230918s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 100 |
_aMartin, PeterM. _912802 |
||
| 245 | 0 |
_aHandbook of Deposition Technologies for Films and Coating,Science, Application and Technology _cMartin, PeterM. |
|
| 250 | _a3rd ed. | ||
| 260 |
_bElsevier _c2010 |
||
| 942 | _cBK | ||
| 999 |
_c21045 _d21045 |
||