| 000 | 00302nam a2200109Ia 4500 | ||
|---|---|---|---|
| 008 | 230918s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 100 |
_aFranz, Gerhard _912897 |
||
| 245 | 0 |
_aLow pressure plasmas and micro structuring technology _cFranz, Gerhard |
|
| 260 |
_bSpringer _c2009 |
||
| 942 | _cBK | ||
| 999 |
_c21204 _d21204 |
||