| 000 | 00318nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 231004s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780471078289 | ||
| 041 | _aeng | ||
| 100 |
_aChapman, Brain _913579 |
||
| 245 | 0 | _aGlow discharge process: sputtering and plasma etching | |
| 260 |
_bJohn Wiley _c1980 |
||
| 942 | _cBK | ||
| 999 |
_c22343 _d22343 |
||