000 00290nam a2200121Ia 4500
008 231017s9999||||xx |||||||||||||| ||und||
041 _aeng
082 _a620.5
_bT09 WAN
100 _aWang, Xiaohao
_914613
245 0 _aMicro and nanotechnology
260 _bTranstech
_c2009
942 _cBK
999 _c25235
_d25235