000			00492nam a2200181Ia 4500
005			20250719141434.0
008			240125s9999||||xx |||||||||||||| ||und||
020			_a9781466589407
041			_aeng
082			_a621.3815 _bT15 SHA.I
245		0	_aDesign of 3D integrated circuits and systems
260			_aBoca Raton : _bCRC Press, _c2015.
300			_a304p.
650			_aApplied physics _918067
700			_aSharma, Rohit _922545
700			_aIniewski, Krzysztof _922546
942			_cBK
999			_c27784 _d27784