| 000 | 00319nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 240125s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780070487093 | ||
| 041 | _aeng | ||
| 100 |
_aHsu, Tai-Ran _916546 |
||
| 245 | 0 | _aMEMS and microsystems design and manufacture | |
| 260 |
_bMcGraw Hill _aNew Delhi _c2002 |
||
| 942 | _cBK | ||
| 999 |
_c28072 _d28072 |
||