| 000 | 00378nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 240125s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bN93 MID.H |
||
| 100 |
_aMiddleman, Stanlay & hochberg, authork. _917099 |
||
| 245 | 0 | _aProcess engineering analysis in semiconductor device fabrication | |
| 260 |
_bMc Graw Hil, Inc. _aNew York _c1993 |
||
| 942 | _cBK | ||
| 999 |
_c28711 _d28711 |
||