| 000 | 00321nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 240125s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a621.3815 _bN90 LEE |
||
| 100 |
_aLee, Hong H. _917100 |
||
| 245 | 0 | _aFundamentals of microelectronics processing | |
| 260 |
_bMcGraw Hill _aNew York _c1990 |
||
| 942 | _cBK | ||
| 999 |
_c28712 _d28712 |
||