| 000 | 00431nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 250221s9999 xx 000 0 und d | ||
| 020 | _a9781680948455 | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bT18 ELE |
||
| 110 | _a3G E-learning LLC | ||
| 245 | 0 | _aMicro electro mechanical systems (MEMS) | |
| 250 | _a2nd ed. | ||
| 260 |
_b3G E-learning _aNew York _c2018 |
||
| 300 | _a331p. | ||
| 650 |
_aApplied physics _918067 |
||
| 942 | _cBK | ||
| 999 |
_c30729 _d30729 |
||