| 000 | 00529nam a22001937a 4500 | ||
|---|---|---|---|
| 005 | 20250421143018.0 | ||
| 008 | 250421b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780201444940 | ||
| 041 | _aeng | ||
| 082 |
_a621.395 _bT02 JAE |
||
| 100 |
_aJaeger, Richard C _921528 |
||
| 245 | _aIntroduction to microelectronic fabrication | ||
| 250 | _a2nd ed. | ||
| 260 |
_aU.S.A _bPearson _c2002 |
||
| 300 | _a316p. | ||
| 440 |
_aModular series on solid state devices _v5 _921529 |
||
| 650 |
_aApplied physics _918067 |
||
| 942 | _cBK | ||
| 999 |
_c31130 _d31130 |
||