| 000 | 00383nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230620s9999||||xx |||||||||||||| ||und|| | ||
| 082 |
_a621.38152 _bT06 MAC |
||
| 100 |
_a Machlin, E. S. _9532 |
||
| 245 | 0 |
_a Materials science in microelectronics _b the effects of structure on properties in thin flims _c Machlin, E. S. |
|
| 250 | _a 2nd ed. | ||
| 260 |
_b Elsevier _c2006 |
||
| 942 | _cBK | ||
| 999 |
_c453 _d453 |
||