| 000 | 00357nam a2200109Ia 4500 | ||
|---|---|---|---|
| 008 | 230620s9999||||xx |||||||||||||| ||und|| | ||
| 082 |
_a621.38152 _bN98 NON.T |
||
| 100 |
_a Nonogaki, Saburo _9536 |
||
| 245 | 0 |
_a Microlithography fundamentals in semiconductor devices and fabrication technology _c Nonogaki, Saburo |
|
| 260 |
_b Marcel Dekker _c1998 |
||
| 942 | _cBK | ||
| 999 |
_c456 _d456 |
||