000			00390nam a2200133Ia 4500
008			230715s9999||||xx |||||||||||||| ||und||
041			_aeng
082			_a621.38152 _bT12 SES
100			_aSeshan, Krishna[ed.] _92576
245		0	_aHandbook of thin film deposition _b:techniques, processes and technologies _cSeshan, Krishna[ed.]
250			_a3rd ed.
260			_bElsevier _c2012
942			_cBK
999			_c7910 _d7910