| 000 | 00363nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 230715s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bT02 MIL |
||
| 100 |
_aOhring, Milton _92665 |
||
| 245 | 0 |
_aMaterial science of thin films _b:deposition and structures _cOhring, Milton |
|
| 250 | _a2nd ed. | ||
| 260 |
_bElsevier _c2002 |
||
| 942 | _cBK | ||
| 999 |
_c8018 _d8018 |
||