| 000 | 00334nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230715s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bN95 SMI |
||
| 100 |
_aSmith, Donald L. _92666 |
||
| 245 | 0 |
_aThin film deposition _b:principles and practice _cSmith, Donald L. |
|
| 260 |
_bMcGraw Hill _c1995 |
||
| 942 | _cBK | ||
| 999 |
_c8019 _d8019 |
||