| 000 | 00402nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230715s9999||||xx |||||||||||||| ||und|| | ||
| 041 | _aeng | ||
| 082 |
_a621.381 _bT14 SHA.P |
||
| 100 |
_aShaw III, Gordon [ed.] _92953 |
||
| 245 | 0 |
_aMEMS and nanotechnology _b:proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics _cShaw III, Gordon [ed.] |
|
| 260 |
_bSpringer _c2014 |
||
| 942 | _cBK | ||
| 999 |
_c8345 _d8345 |
||