000			00337nam a2200121Ia 4500
008			230715s9999||||xx |||||||||||||| ||und||
041			_aeng
082			_a621.3815 _bT15 SHA.I
100			_aSharma, Rohit [ed.] _93001
245		0	_aDesign of 3D integrated circuits and systems _cSharma, Rohit [ed.]
260			_bCRC Press _c2015
942			_cBK
999			_c8394 _d8394