000 | 00311nam a2200109Ia 4500 | ||
---|---|---|---|
008 | 230620s9999||||xx |||||||||||||| ||und|| | ||
082 |
_a621.381 _bT00 RAI |
||
100 | _a Rai Choudhary, P.[ed.] | ||
245 | 0 |
_a MEMS and MOEMS technology and applications _c Rai Choudhary, P.[ed.] |
|
260 |
_b PHI _c2000 |
||
942 | _cBK | ||
999 |
_c870 _d870 |